Mathematical modeling the process of gas flow in the turbomolecular pump using the Cercignani-Lampis gas-surface interaction model
https://doi.org/10.15514/ISPRAS-2022-34(6)-16
Abstract
In this paper, the process of gas flow in the flow path of a turbomolecular vacuum pump using the Cercignani-Lampis (CL) model was simulated. CL model was used as new boundary conditions when calculating the transition probability. The test particle method (Monte Carlo method) was used in the simulation. The calculation of the molecules transition probability through the blade channel in the forward and reverse directions, the transition resulting probability, the compression ratio was made.
About the Authors
Uliana Saidovna GORDEEVA
Bauman Moscow State Technical University
Russian Federation
Russian Federation
PhD Research, Graduate of the Department of Vacuum and Compressor Equipment
Felix Maratovich SHARIPOV
Universidade Federal do Paraná
Brazil
Brazil
Professor at Department of Physics
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Review
For citations:
GORDEEVA U.S., SHARIPOV F.M. Mathematical modeling the process of gas flow in the turbomolecular pump using the Cercignani-Lampis gas-surface interaction model. Proceedings of the Institute for System Programming of the RAS (Proceedings of ISP RAS). 2022;34(6):197-206. (In Russ.) https://doi.org/10.15514/ISPRAS-2022-34(6)-16
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