For citations:

GORDEEVA U.S., SHARIPOV F.M. Mathematical modeling the process of gas flow in the turbomolecular pump using the Cercignani-Lampis gas-surface interaction model. Proceedings of the Institute for System Programming of the RAS (Proceedings of ISP RAS). 2022;34(6):197-206. (In Russ.) https://doi.org/10.15514/ISPRAS-2022-34(6)-16